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The subthreshold slope is a feature of a MOSFET's current–voltage characteristic.
In the subthreshold region the drain current behaviour – though being controlled by the gate terminal – is similar to the exponentially increasing current of a forward biased diode. Therefore a plot of logarithmic drain current versus gate voltage with drain, source, and bulk voltages fixed will exhibit approximately linear behaviour in this MOSFET operating regime. Its slope is the subthreshold slope.
The subthreshold slope is closely related to its reciprocal value called subthreshold swing Ss-th which is usually given as:[1]

= depletion layer capacitance
= gate-oxide capacitance.
Subthreshold swing typical value at room temperature:
.
A
(decade) corresponds to a 10 times increase of the drain current Id.
A device characterized by steep subthreshold slope exhibits a faster transition between off (low current) and on (high current) states.
References [edit]
- ^ Physics of Semiconductor Devices, S. M. Sze. New York: Wiley, 3rd ed., with Kwok K. Ng, 2007, chapter 6.2.4, p. 315, ISBN 978-0-471-14323-9.
External links [edit]
- Optimization of Ultra-Low-Power CMOS Transistors; Michael Stockinger, 2000



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